ABSTRACT
Qi 12-100 Stevie and Vasile (1981) Qel 5-40 Fliplet et al (1980)
ka — Nygaard et al (1978)
Qa, Qv 0-5 Hall (1978)
ka 09-40 Schneider and Brau (1978)
ka 09-4 Chen et al (1977)
Qel 0-5 Schneider and Hay (1976a)
Qel 0-5 Schneider and Hay (1976b)
ka 0-01 Sides et al. (1976) Qex 0-136 Rescigno et al (1976)
Qdiss 0-32 Decorpo et al. (1970)
Note:Bold font indicates experimental study ka = Attachment rate; Qa = dissociative attachment cross section; Qel = elastic; Qex = excitation; QV = vibrational excitation; α/N = reduced ionization coefficient; η/N = reduced attachment coefficient
Table 173 and Figure 171 show the momentum transfer cross sections
Theoretically derived elastic scattering cross sections (Rescigno et al, 1976) are shown in Figure 171
Vibrational excitation threshold is 110 meV (Hiyashi and Nimura, 1983)Theoretically derived total vibrational excitation cross sections are shown in Table 174
Dissociation of F2 molecule occurs according to the following reactions:
F2 + e → F + F− (171)
F2 + e → F− + F+ + e (172)
F2 + e → F+ + F + 2e (173)
Reaction 171 is dissociative attachment with appearance potential of 00 eV, Reaction 172 is attachment by ion pair
TABLE 17.4 Vibrational Excitation Cross Sections
Energy (eV) Qv (10−20 m2)
01 0010
02 0652
04 2410
06 2164
08 1344
1 0859
2 0151
3 0051
4 0034
6 0015
Source:Adapted from Hayashi, Mand TNimura, J. Appl. Phys, 54, 4879, 1983
Transfer Cross Sections for F2 Energy (eV) QM (10−20 m2) Energy (eV) QM (10−20 m2)
001 1031 10 1007
002 1026 15 850
004 1020 20 718
006 1020 25 614
008 1022 30 532
010 1026 35 465
020 1042 40 412
040 1081 45 370
060 1192 50 336
080 1387 60 287
1 1648 80 228
2 2733 100 181
3 1772 150 104
4 1543 200 072
6 1243 300 066
8 1085 400 006
Source:Digitized from Hayashi, Mand TNimura, J. Appl. Phys, 54, 4879, 1983
Total Cross Sections for F2 Energy (eV)
QT (10−20 m2)
Energy (eV)
QT (10−20 m2)
Energy (eV)
QT (10−20 m2)
00001 8000 3 2057 60 514
001 5471 4 1556 80 467
002 3496 6 1278 100 424
004 1840 8 1255 150 323
006 1840 10 1040 200 266
008 1702 15 956 300 233
01 1677 20 798 400 165
02 1693 25 770 500 119
04 1411 30 694 600 104
06 1913 35 640 800 089
08 1669 40 603 1000 071
1 1815 45 571
2 2821 50 547
0.01 0.1 1 10 Energy (eV)
100 1000
0.1
0.01
Q (1
m 2 )
Total Elastic Momentum transfer
Qel
QT
Qm
F2
production with appearance potential of 158 eV, and Reaction 173 is dissociative ionization with appearance potential of 192 eV (DeCorpo et al, 1970)
DeCorpo et al(1970) have measured the relative intensity for the dissociation cross section, and the cross sections normalized to 10 × 10−21 m2 at 10 eV energy are shown in Table 175 and Figure 172
Ionization cross sections have been measured by Stevie and Vasile (1981) in the energy range 17-102 eV as shown in Table 176 and Figure 173The cross sections derived by Hayashi and Nimura (1983) for higher energy range are also shown in the same figure
Attachment processes are shown by Reactions 171 and 172 Attachment cross sections measured by Chantry et al(1982) are shown in Table 177 and Figures 174 and 175
Cross Sections Measured by Stevie and Vasile (1981)
Energy (eV) Qi (10−20 m2) Energy (eV) Qi (10−20 m2)
17 002 38 064 18 004 41 069 19 008 43 074 20 010 45 079 21 014 47 082 22 015 49 084 23 020 53 091 26 028 58 100 28 035 64 105 30 043 69 110 32 049 80 117 34 056 91 121 36 059 102 125
Dissociation Cross SD et al. (1970) Normalized at 1.0eV
Energy (eV)
Qdiss (10−22 m2)
Energy (eV)
Qdiss (10−22 m2)
02 1749 6 0611
04 3501 8 0352
06 3980 10 0077
08 6472 15 0279
1 1000 20 1689
2 3546 25 5200
3 1186 30 8814
4 0591
0.1
0 1 10 100
Energy (eV)
(1 0-
2 )
Dissociation F2 + e → F-+ F
10 100 Energy (eV)
1.5
0.5
Q i (1
m 2 )
F2 Stevie (1981) Hayashi (1983)
TABLE 17.7 Attachment Cross Sections for F2 Energy (eV) Qi (10−20 m2) Energy (eV) Qi (10−20 m2)
100E-04 80 04 265
001 444 045 225
002 247 05 192
003 137 06 134
004 82 07 094
005 74 08 0655
007 71 09 0455
01 65 1 032
015 545 12 0153
02 48 14 0075
025 425 16 0037
03 365 18 0022
035 31 2 0014
Source:Adapted from Chantry, PJin HSWMassey, EWMcDaniel, and BBederson (Eds), Applied Collision Physics Vol. 3: Gas Lasers, Academic, New York, NY, 1982, p 35
Density-reduced ionization coefficients (α/N) theoretically derived by Hayashi and Nimura (1983) are shown in Table 178 and Figure 176 Figure 177 shows the details at lower E/N
Ionization Coefficients (α/N), Attachment Coefficients (η/N), and Effective Ionization Coefficients (α-η)/N E/N (Td) α/N (10−20 m2) η/N (10−20 m2) (α-η)/N (10−20 m2)
100 0020 0522 − 0502 125 0039 0421 − 0382 150 0081 0331 − 0251 175 0126 0263 − 0138 200 0181 0224 − 0043 225 0225 0195 0029
250 0275 0165 0110
275 0346 0139 0208
300 0411 0124 0287
325 0462 0114 0348
350 0508 0103 0405
375 0557 0091 0467
400 0617 0081 0536
425 0682 0074 0609
450 0748 0068 0679
475 0805 0064 0742
500 0852 0059 0793
550 0920 0050 0871
600 0975 0042 0934
650 1035 0035 1000
700 1103 0031 1072
750 1174 0028 1146
800 1247 0026 1221
850 1318 0023 1295
900 1387 0020 1367
950 1453 0018 1435
1000 1517 0017 1500
1250 1785 0011 1774
1500 1970 1970
1750 2101 2101
2000 2230 2230
2250 2409 2409
Source:Adapted from Hayashi, Mand TNimura, J. Appl. Phys, 54, 4879, 1983
10-4 10-3 10-2 10-1 100 101 102
1.0
0.1
Q i ,Q
a( 10
2 )
Energy (eV)
Attachement Ionization
F2
10-4 10-3 10-2 10-1 100 101 102 103 Energy (eV)
10-1
10-2
Q (1
m 2 )
1 F2
2 7
3 4
6 5
Low-energy attachment coefficients determined by Nygaard et al(1978) using the current pulse method are shown in Table 179Density-reduced attachment coefficients (η/N) theoretically derived by Hayashi and Nimura (1983) are shown in Table 178 and Figure 176Figure 177 shows the details at lower E/N
2 The essential feature is that the rate decreases with increasing energy in the range 004-30 eV (McCorkle et al, 1983)
TABLE 17.9 Attachment Coefficients at Low E/N for F2 E/N (Td) η/N (10−20 m2) E/N (Td) η/N (10−20 m2) 30 629 90 216 40 564 100 228 45 509 120 192 50 456 130 166 55 428 140 164 60 392 150 185 70 260 160 190 80 286
Source:Adapted from Nygaard, K J et al, Appl. Phys. Lett, 32, 351, 1978 102 103 10455
E/N (Td)
2.0
1.5
1.0
α/ N,
η /N
,( α-
η) /N
(1 0-
2 )
0.5
Fluorine (F2)
η/N
(α-η)/N
α/N
200 300 400 500100
0.6
0.4
0.2
0.8
Fluorine (F2)
E/N (Td)
α/N
η/N
(α-η)/N
α/ N,
η /N
,( α-
η) /N
(1 0-
2 )
0.01
1.5
0.5
0 0.1 1 10
Energy (eV)
K a (1
m 3 /
s)
Nitrogen buffer Argon bufferF2
TABLE 17.10 Attachment Rates for F2 Temperature (K); Energy (eV)
Attachment Rate (m3/s) Method Reference
233 12 × 10−14 Swarm McCorkle et al (1986)
298 17 × 10−14 373 19 × 10−14 (1) 70 × 10−15 Beam Schneider and Brau
(1978) (5) 75 × 10−16 Current pulse Nygaard et al (1978) (1) 29 × 10−15 Beam Chen et al (1977) 350 31 × 10−15 FA Sides et al (1976) 600 46 × 10−15
Note: Unless otherwise mentioned the temperature (energy) is thermal FA = flowing afterglow
