ABSTRACT
Szmytkowski et al. (1987)a Szmytkowski et al.
(1987)a
Energy (eV)
QT (10-20 m2)
Energy (eV)
QT (10-20 m2)
Energy (eV)
QT (10-20 m2)
05 1580 46 96 722 144
06 1370 47 93 81 1381
07 1190 48 866 902 1339
08 1020 50 814 100 1254
09 915 52 778 1102 1214
10 835 54 770 121 1165
11 763 56 810 1322 1117
12 710 58 810 144 1103
13 672 59 810 169 993
14 634 60 830 196 925
15 612 65 842 225 871
16 607 70 901 256 831
18 589 75 974 289 784
20 590 80 983 324 731
22 611 85 105 361 679
24 673 90 111 400 640
26 723 95 116 441 612
28 760 10 120 484 558
30 860 12 132 576 493
31 910 135 136 676 441
32 960 15 139 784 394
33 1110 175 149 900 353
34 1280 20 158 1024 328
35 1360 225 158 1156 295
36 1480 25 160 1296 269
365 1540 275 162 1444 238
37 1600 30 162 1600 213
38 167 35 161 1764 192
39 161 40 159 1936 179
395 152 45 158 2116 162
40 142 50 151 2304 15
41 130 60 149 2500 129
42 124 65 144 2704 127
43 114 70 139 2916 115
44 111 80 134
45 104
Source: Szmytkowski, C et al, J. Phys. B: At. Mol. Phys, 20, 5817, 1987 With kind permission of Institute of Physics, England
a Measurements in another laboratory
Total Scattering Cross SCO2 Energy (eV) QT (10-20 m2) Energy (eV) QT (10-20 m2)
005 6794 275 626
006 6382 300 732
007 6012 320 905
009 5641 330 1021
009 5147 335 1081
011 4735 340 1142
012 4365 345 1203
014 3953 350 1264
016 3624 355 1324
018 3418 360 1384
019 3006 365 1438
024 2718 370 1480
027 2512 375 1509
030 2224 380 1534
040 1935 385 1551
048 1688 390 1547
050 1556 395 1529
060 1292 40 1506
07 1146 41 1448
08 1012 42 1382
09 902 43 1315
10 817 45 1171
12 706
14 633
16 590
18 567
20 556
225 565
250 579
Source:Adapted from Ferch, J, CMasche, and WRaith, J. Phys. B: At. Mol. Phys, 14, L97, 1981
Note:005 ≤ ε ≤ 45 eV Digitized from graphical presentation
Figure 273 shows the differential scattering cross sections for the bending modes (010) and (020)General comments for differential scattering cross section are
1The rotational and vibrational excitation produces a change in the shape of the angular distribution of the differential scattering cross section (Figure 274)
2 The differential cross section for the bending mode is approximately symmetric about 90°, but not so for symmetrical stretching
3 The cross section for asymmetric mode is about 10% compared to the two other modes
Table 275 and Figure 276 show the momentum transfer cross section for the energy range 0-1000 eV
Inelastic processes are listed in Table 276 (Lowke et al, 1973)Table 277 gives detailed vibrational energy levels (Boness and Schulz, 1974)Energy and vibrational spacing of CO2− ion are shown in Table 278 (Sanche and Schulz, 1973)
See Table 279
0 50 100 150 Angle (°)
Di ffe
re nt
ial cr
os ss
ec tio
n (A
rb itr
ar yu
ni ts)
10 ×0.1
(001)
(010) (100)
TABLE 27.4 Elastic Scattering Cross Sections for CO2 Energy (eV) Qel (10-20 m2) Energy (eV) Qel (10-20 m2)
0155 250 600 110 105 58 900 75 20 462 100 68 40 110 500 298 100 1061 800 231 200 1459 1000 192 500 117
Source:Adapted from Raju, GG, Gaseous Electronics: Theory and Practice, Taylor & Francis, London, 2005
Note:See Figure 275 for graphical presentation
0.01 0.1 1 10 100 1000 10,000 Energy (eV)
Cr os
ss ec
to n
(1 0-
2 )
QT (CO2)
0 50 100 150 0 50 100 150 Scattering angle (°)
D CS
(1 0-
2 / sr
)
D CS
(1 0-
2 / sr
)
Scattering angle (°)
0.1 1.5 eV
3.5 eV
3.8 eV
4.0 eV
2.0 eV
3.0 eV
0.1
0.1
0.1
0.1
0.1
TABLE 27.5 Momentum Transfer Cross Sections in CO2 Energy (eV)
QM (10-20 m2)
Energy (eV)
QM (10-20 m2)
Energy (eV)
QM (10-20 m2)
0000 6000 1000 555 80 807
0001 5400 12 502 90 924
0002 3870 13 490 100 994
0010 1700 15 483 150 1119
0020 1190 20 453 200 1017
0080 580 30 596 300 751
0100 520 38 769 600 415
0150 400 40 722 1000 265
0200 310 50 566 2000 108
0300 2030 60 669 3000 066
0400 1430 65 656 5000 036
0500 1090 70 656 10000 014
Note:0-15 eV and 100-1000 eV, LPitchford, personal communication, 2003, see Raju (2005); 15-100 eV, Tanaka et al (37, 1998)
0 5
1 5
10 Energy (eV)
In te
gr at
ed Q
M (1
m
1 Momentum transfer Cross sections (CO2)2
3 4
TABLE 27.6 Selected Inelastic Processes and Threshold Energies in CO2 Energy loss
Threshold (eV) Process Remarks
0083 0083 000 → 010 I Bending mode 0167 0167 000 → 020 + 100 Bending and
symmetrical stretching
0291 0291 000 → 001 I Asymmetrical stretching
0252 25 000 → 0n0 + n00 Bending and symmetrical stretching
0339 15 000 → 0n0 + n00 Bending and symmetrical stretching
0422 25 000 → 0n0 + n00 Bending and symmetrical stretching
0505 25 000 → 0n0 + n00 Bending and symmetrical stretching
25 25 000 → 0n0 + n00 Bending and symmetrical stretching
385 385 e + CO2 → CO + O− Dissociative attachment 70 70 Electronic excitation
105 105 Electronic excitation
133 133 e + CO2 → CO2+ + 2e Ionization 209 209 e + CO2 → CO+ + O + 2e Dissociative ionizationa
226 226 e + CO2 → CO + O+ + 2e Dissociative ionizationa
246 246 e + CO2 → C+ + O2 + 2e Dissociative ionizationa
Sources: Adapted from Lowke, J J, A V Phelps, and B W Irwin, J. Appl. Phys, 44, 4664, 1973; Crowe, Aand JWMcConkey, J. Phys. B: At. Mol. Phys, 7, 349, 1974
Note:A more detailed energy list is given in Table 277 a Reference for the last three rows
0 5 5 5
1 10 Energy (eV)
Excitation Levels of CO2−
Vibrational Transition: ν → ν + 1 Spacing (meV)
Energy of Vibrational State (eV)
0 → 1 138 314 1 → 2 136 328 2 → 3 134 341 3 → 4 132 354 4 → 5 130 367 5 → 6 128 380 6 → 7 127 393 7 → 8 125 406 8 → 9 123 418 9 → 10 122 431 10 → 11 121 442 11 → 12 454
Source:Adapted from Sanche, Land GJSchulz, J. Chem. Phys, 58, 479, 1973
Note:See Figure 277 for graphical presentation
Vibrational Energy LO2
Calculated Energy Level (eV) Experimental Energy
Loss Peak (eV)Designation n10 n00
0110 0083 0083
1000 0167 0168
1110 0250 0250
2000 0333 0335
2110 0416 0415
3000 0498 0500
310 0582 0580
400 0662 0665
410 0746 0740
500 0825 0820
510 0910 0900
600 0967 0985
610 1072 106
700 1149 114
710 1234 123
800 1309 130
810 1395 139
900 1469 147
910 1555 155
10,00 1627 161
10, 10 1714 170
11, 00 1785
11, 10 1872 187
12, 00 1942
12, 10 2030 202
13, 00 2098
13, 10 2186 217
14, 00 2253
14, 10 2342 235
15, 00 2407
15, 10 2496 250
16, 00 2561
16, 10 2650 265
17, 00 2713
17, 10 2803 278
18, 00 2864
18, 10 2955 293
19, 00 3015
19, 10 3106 310
20, 00 3165
20, 10 3256 323
21, 00 3313
21, 10 3405
Source:Adapted from Boness, MJWand GJSchulz, Phys. Rev. A, 9, 1969, 1974
2.5
Sc at
te rin
gc ro
ss se
ct io
n (∼
10 –2
0 m 2 )
3.0 3.5 Energy (eV)
4.0 5.0
CO2
A discussion of excitation levels of the molecule is given by Raju (2005)Table 2710 shows excitation cross sections recommended by Raju (2005) and Figure 278 shows selected available data Also see Figure 279
See Table 2711
Attachment processes according to Spence and Schulz (1974) are as follows
CO2 + e → CO + O− (271)
CO2 + e → C + O2− (272)
O− + CO2 → CO + O2− (273)
CO2 + e → C− + 2O (274)
Following Reaction 271, three-body process may also occur at higher gas number densities according to
O− + CO2 + CO2 → O3− + CO2 (275)
Reactions 271, 272, and 274 are dissociative attachments and Reaction 273 is an ion-molecule reactionReaction 275 exhibits dependence on gas number density (Table 2717) The observed peak energy and peak cross section are shown in Table 2712
Vibrational Excitation Cection for CO2
Energy (eV) Mode (100)
Qvib (10-20 m2) Mode (010)
Qvib (10-20 m2) Mode (001)
Qvib (10-20 m2)
01 2224
02 1882
03 1236 1054
04 0967 1695
05 0050 0835 1628
08 0627 1216
10 0075 0498 0997
15 0225 0411 0761
20 0562 0453 0646
25 2946 0678 0558
30 2737 1122 0490
35 2158 2945 0466
40 1291 3400 0450
45 0290 2661 0434
50 0874 1320 0427
60 0405 0564 0408
70 0215 0460 0452
80 0225 0452 0467
90 0193 0321 0370
100 0165 0211 0243
120 0059 0053 0231
140 0020 0013 0199
150 0007
160 0007 0183
180 0002 0156
200 0002 0152
30 0100
40 008
50 0065
60 0057
70 0050
80 0046
90 0043
100 0040
Source:Adapted from Nakamura, Y, Aust. J. Phys, 48, 357, 1995 Note:Digitized and interpolated from original presentationSee Figure 278
for graphical presentation
Cross Sections for CO2 Recommended
Energy (eV) Qex (10-20 m2) Energy (eV) Qex (10-20 m2)
12 002 65 260
13 017 70 260
14 039 75 260
15 060 80 263
16 088 85 262
17 116 90 260
18 135 95 260
19 148 100 261
20 161 125 260
25 201 150 258
30 220 175 254
35 236 200 248
40 245 225 242
45 250 250 236
50 256 275 226
55 257 300 222
60 259
Source:Adapted from Raju, GG, Gaseous Electronics: Theory and Practice, Taylor & Francis, London, 2005
Table 2713 and Figure 2713 present the attachment cross sections for CO2 (Rapp and Briglia, 1965)
10 100 1000 Energy (eV)
CO2
0.1
0.01
Cr os
ss ec
tio n
(1 0-
2 )
TABLE 27.11 Recommended Total Ionization Cross Section for CO2
Straub et al. (1996) Rapp and Englander-Golden (1965)
Energy (eV) Qi (10-20 m2) Energy (eV) Qi (10-20 m2)
145 0055
15 0143 15 0097
20 0564 155 0135
25 1115 16 0174
30 1698 165 0215
35 2095 17 0255
40 2414 18 0333
45 2673 185 0373
50 2881 19 0427
55 3062 195 0452
60 3239 21 0577
65 3356 22 0676
70 3454 23 0777
75 3533 24 0880
80 3623 26 1117
85 3682 28 1337
90 3739 30 1513
95 3777 32 1654
100 3810 34 1777
110 3823 36 1891
120 3813 38 1997
140 3774 40 2111
160 3643 45 2366
180 3546 50 2586
200 3426 55 2762
225 3300 60 2929
250 3139 65 3070
275 3046 70 3175
300 2887 75 3272
350 2632 80 3351
400 2480 85 3413
0.1
0.01
0.001 0 10 20 30 40
Cr os
ss ec
tio n
(1 0-
2 )
Cr os
ss ec
tio n
(1 0-
2 )
Mode (100)
CO2
Energy (eV) Energy (eV)
0.1
0.01 0.1 1 10 100
0.1
0.01 0.1 1 10
Energy (eV) 100
Cr os
ss ec
tio n
(1 0-
2 )
Mode (010)
Recommended Total ICross S
Straub et al. (1996) Rapp and Englander-Golden (1965)
Energy (eV) Qi (10-20 m2) Energy (eV) Qi (10-20 m2)
450 2273 90 3457
500 2122 100 3518
550 1988 105 3527
600 1879 110 3545
650 1785 115 3554
700 1702 120 3554
750 1622 125 3548
800 1541 130 3545
850 1464 135 3536
900 1419 140 3518
950 1371 145 3510
1000 1312 150 3483
160 3439
180 3360
200 3255
250 3017
300 2780
350 2595
400 2419
450 2269
500 2137
600 1909
700 1733
800 1574
900 1469
1000 1399
Note:The total cross sections from Straub et al(1996) are calculated from partial ionization cross sectionsSee Figures 2710 through 2712 for graphical presentation
10 100 Energy (eV)
Cr os
ss ec
tio n
(1 0-
2 )
10 100 1000 10 100 1000
10 100 1000 10 100 1000
A A
C
AA
D E
B
CO2
× 100
Energy (eV)
5 4 3 2 1 0
5 4 3 2 1 0
5 4 3 2 1 0
10 100 1000
10 100 1000
10 100 1000 Energy (eV)
Io ni
za tio
n cr
os ss
ec tio
n (1
m 2 )
CO2 A
A
A
H
G
F ×10
×1000
×1000
See Table 2715
1 0.1
Cr os
ss ec
tio n
(1 0-
2 )
10 Energy (eV)
Attachment cross section
(CO2)
Attachment Processes
Ion Species Peak Energy
(eV) Peak Cross
Section (10-24 m2) Process
O− 43 168 271
81 487 271
O2 − 82 271 followed by 273
113 ~1 × 10−4 273 129 ~1 × 10−4 273
C− 160 274
170 274
187 ~020 274
Source:Adapted from Spence, Dand GJSchulz, J. Chem. Phys, 60, 216, 1974
TABLE 27.13 Total Attachment Cross Sections for CO2 Energy (eV) Qi (10-24 m2) Energy (eV) Qi (10-24 m2)
33 00 67 290
34 0176 68 387
35 0616 69 528
36 141 70 686
37 273 71 898
38 528 72 1144
39 818 73 1452
40 1065 74 1778
41 1276 75 2165
42 1408 76 2666
43 1478 77 3124
44 1364 78 3573
45 1206 79 3960
46 977 80 4242
47 774 81 4286
48 598 82 4136
49 440 83 3802
50 282 84 3362
51 194 85 2834
52 132 86 2147
53 097 87 1725
54 0616 88 1364
55 0264 89 1021
56 0176 90 783
57 0088 91 616
58 0000 92 484
59 0088 93 370
60 0176 94 290
61 0264 95 229
62 0440 96 176
63 0616 97 132
64 106 98 106
65 141 99 0792
66 202 100 0616
Note: See Figure 2713 for graphical presentation
TABLE 27.14 Drift Velocity of Electrons
E/N (Td) W (103 m/s) E/N (Td) W (103 m/s)
03 0536 80 1244
04 0714 90 1338
05 089 100 1426
06 1068 150 1787
07 1246 200 2193
08 1424 250 2660
100 1781 300 2941
200 356 350 3057
300 537 400 3345
400 72 450 3734
500 912 500 4103
600 1112 600 4501
700 1324 700 4904
800 1551 800 5462
1000 206 900 5720
1200 268 1000 6630
1400 346 2000 1411
1700 487 3000 1793
2000 632 4000 2125
60 1159 5000 2425
70 1245
Source:Adapted from Raju, GG, Gaseous Electronics: Theory and Practice, Taylor & Francis, London, 2005
Note:See Figure 2714 for graphical presentationFigure 2715 shows the influence of gas pressure on drift velocity
Figure 2717 shows the longitudinal diffusion coefficient (DL) as a ratio of mobility (DL/µ) and density-normalized product (NDL)
Characteristic Energy (Dr/µ) E/N (Td) Dr/µ (V) E/N (Td) Dr/µ (V)
007 0024 30 111
010 0024 40 150
03 0024 50 175
050 0025 70 223
080 0028 100 282
10 0029 200 534
20 0032 300 484
30 0027 400 558
40 0026 500 611
50 0030 700 688
70 0039 1000 811
100 0053 1500 1050
20 047
Source:Adapted from Raju, GG, Gaseous Electronics: Theory and Practice, Taylor & Francis, London, 2005
Note:See Figure 2716 for graphical presentation
10-1 100 101 102 103 104 E/N (Td)
W (CO2)
10-1
W (1
03 m
/s )
0 0.29 0.65 E/N (Td)
0.88 1.17
CO2
El ec
tio n
dr ift
ve lo
cit y(
10 3 m
/s )
1 0.1
100 1000
1 100 10 1000
NDL
DL/μ
N D L
[1 02
2 / (m
s)]
D L /μ
(V )
E/N (Td)
10-2 10-1 100 101 102 103 104
E/N (Td)
Dr/μ (CO2)
D r /μ
(V )
10-1
10-2
10-3
See Table 2716
Density-reduced attachment coefficients are shown in Figure 2719 Table 2717 shows the gas number density dependence of attachment coefficients for three-body process
the expression
α N
F G E
= −
exp
N
(276)
are F = 297 × 10−20 m2 and G = 616 Td for the range 80 ≤ E/N ≤ 1700TdSchlumbohm (1965) obtains F = 148 × 10−20 m2 and G = 568 Td−1 for the range 225 ≤ E/N ≤ 450 Td
0 75 100
E/N (Td) 125 150
η/ N
(1 0-
2 ) Bhalla et al. Alger et al. Davies et al.