ABSTRACT
The dissociative attachment cross sections in CD4 as a function of electron energy are shown in Table 54.4. See Figure 54.2 for graphical presentation.
54.1 Selected References for Data ........................................................................................................................................... 337 54.2Ionization Cross Section.................................................................................................................................................. 337 54.3Attachment Cross Section............................................................................................................................................... 337 54.4Drift Velocity................................................................................................................................................................... 339 54.5Characteristic Energy...................................................................................................................................................... 339 References ................................................................................................................................................................................. 339
TABLE 54.1 Fundamental Vibrational Modes of CD4 and Comparison with Those of Methane
Energy (eV)
Designation Mode CD4 CH4
ν1 Symmetric stretch 0.261 0.362 ν2 Degenerate deformation 0.135 0.190 ν3 Degenerate stretch 0.280 0.374 ν4 Degenerate deformation 0.123 0.162
TABLE 54.2 Selected References
Quantity Energy Range (eV) Reference
Qi 0-200 Tarnovsky et al. (1996)
QM, QV 0-10 Pollock (1968a)
Qa 0-114 Sharp and Dowell (1967)
Swarm Properties
Dr/µ 0.2-25 Millican and Walker (1987) We, Dr/µ 0-10 Kleban and Davis (1978) We, Dr/µ 0-10 Pollock (1968b)
Note:QM = momentum transfer; Qi = ionization; Qv = vibrational excitation; Dr = radial diffusion coefficient (m2/s); µ = mobility (m2/V s); We = drift velocity (m/s).
