chapter  4
32 Pages

Fab Implementation: MfD Response

Design for manufacturability (DfM) efforts conclude at tapeout, which is the latest phase for changing the design database into the product database. Implementation of mask data in IC manufacturing has now to create an optimal response to DfM and synergy with the design. It should either take advantage of DfM efforts built into mask layers or create an alternate path for them to become less complex and costly. This chapter discusses the handshake between the various manufacturing techniques and requirements for design and computed-aided design (CAD) to best meet product line expectations concerning the final product features by an effort complementary to DfM, that is, by manufacturability for design (MfD).