ABSTRACT
This chapter reflects the contrast between the rather settled state of macroscale flexure pivots, and the as yet entirely unexplored space of the microelectromechanical flexure scanners (MEMS) flexure pivot. In the case of symmetrical designs, the easiest approach is to multiply the width of a single leg by the total number of flexures to model the flexure as a unit. It will be noticed immediately from inspection of the relationships among the physical constants pertinent to flexure materials that the stress is directly proportional to Young's modulus. It is assumed that the flexure designer will take into account the environment in which the equipment will live, and take suitable precautions against atmospheric or environment corrosion. Most of the materials usually chosen for flexure material have intrinsic resistance to laboratory or office environments which is adequate protection. It is anticipated that electrostrictive actuators may replace piezoelectric actuators in MEMS in the near future.
