ABSTRACT
Modeling and control of thin filmmicrostructure in thin filmdepositionprocesses has attracted significant research attention in recent years. Specifically, kineticMonteCarlo (kMC)models based on a square lattice and utilizing the solid-on-solid (SOS) approximation for deposition were initially employed to describe the evolution of filmmicrostructure anddesign feedback control laws for thin film surface roughness [1,2]. Furthermore, a method that couples partial differential equation (PDE) models and kMC models was developed for computationally efficient multiscale optimization of thin film growth [3]. However, kMC models are not available in closed form and this limitation restricts the use of kMCmodels for system-level analysis and design of model-based feedback control systems.
