ABSTRACT
This chapter is written for readers who may lack a strong background, progressing to different areas of physical modeling of major classes of MEMS and NEMS including PZT-based. It aims to apply the synthesis paradigm (synthesis and classification solver), develops nonlinear mathematical models to model complex electromagnetic-mechanical (electromechanical) dynamics, performs optimization, designs closed-loop control systems, and performs data-intensive analysis in the time domain. The chapter illustrates the lumped-parameter mathematical model development for microactuators. It presents the use of classical mechanics to model distinct electromechanical systems including MEMS. A thorough consideration of friction is essential for understanding the operation of MEMS, as well as electromechanical systems in general. The majority of rotating micromachines and microtransducers designed and fabricated to date are synchronous microdevices. Rotational and translational nanomachines, controlled by nanoscale integrated circuits, can be widely used as actuators and sensors.
