ABSTRACT
This chapter focuses on the system-level modeling of microelectromechanical systems (MEMS) / nanoelectromechanical systems (NEMS) -based systems. System-level modeling has a central role in systems engineering. Devising system-level models that faithfully represent complex systems is not a trivial problem and is a prerequisite to the application of formal analysis techniques. Usually, system-level modeling techniques are applied at the early phases of system development and at a higher level of abstraction. Effective system-level design involves representing the entire system at high levels of abstraction and modeling it at high simulation speeds. System-level modeling of MEMS/NEMS-based systems is an ongoing area of research with the aim to model, as accurately as possible, the micro/nano-system device behavior at the system level as well as at the lower levels of abstraction. Modeling at the device level involves a MEMS/NEMS structure with or without the signal conditioning and control electronics.
