ABSTRACT
Tables adapted from Palmer, J. M., Properties of metals, in Handbook of Optics, Vol.II (McGraw-Hill, New York, 1995), p. 35.11.
Mirror Substrate Materials Density Young's modulus Specific stiffness
Material (glcm3) (GN/m2) (arbitrary units)
Fused silica 2.19 72 33 Beryllium (I-70) 1.85 287 155 Aluminum ( 6061) 2.70 68 25 Copper 8.94 117 13 Stainless steel (304) 8.00 193 24 Invar (36) 8.05 141 18 Silicon 2.33 131 56 Silicon carbide (30% Si) 2.89 330 114 Silicon carbide CVD) 3.21 465 145
Thermal Properties of Substrate Materials Coeff. linear Specific heat Thermal Thermal
expansion capacity conductivity diffusivity Material (106 K 1) (J/g K) (W/mK (10"6 m 2/s)
Fused silica 0.50 750 1.4 0.85 Beryllium (I -70) 11.3 1925 216 57.2 Aluminum ( 6061) 22.5 896 167 69 Copper 16.5 385 391 115.5 Stainless steel (304) 14.7 500 16.2 4.0 Invar (36) 1.0 515 10.4 2.6 Silicon 2.6 710 156 89.2 Silicon carbide (30% Si) 2.6 670 155 81.0 Silicon carbide CVD) 2.4 733 198 82.0
Material
Fused silica Beryllium (I-70) Aluminum (6061) Copper Stainless steel (304) Invar (36) Silicon Silicon carbide (30% Si) Silicon carbide CVDi)
Steady state distortion coefficient<•) (J.,Lm!W)
0.36 0.05 0.13 0.53 0.91 0.10 0.02 0.02 0.01
(a) Linear expansion coefficient/thermal conductivity. (b) Linear expansion coefficient/thermal diffusivity.
