ABSTRACT
A large variety of micro- and nanoscale structures, devices and systems have been widely used and a worldwide market for microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) and their applications will drastically increase in the near future. The complexity of phenomena and effects in large-scale microelectromechanical systems MEMS and NEMS requires one to pursue new fundamental and applied research as well as engineering and technological developments. Fundamentals of electrical, mechanical, and computer engineering as well as science and technology are utilized with the ultimate objective of guaranteeing the synergistic combination of fundamental theory, precision engineering, microelectronics, microfabrication, and informatics in design, analysis, and optimization. Different MEMS and NEMS must be designed depending upon the specifications, requirements, objectives, and applications. Electromechanical, electro-opto-mechanical, and electro-chemo-opto-mechanical MEMS and NEMS have been developed. In general, monolithic MEMS integrate microassembled devices that have electrical, electronic and mechanical components. Biological actuators are based upon electromagnetic-mechanical-optical-chemical phenomena and processes.
