ABSTRACT
Micro- and nanoelectromechanics focus on the integrated design, data-intensive analysis, heterogeneous simulation, optimization and virtual prototyping of intelligent and high-performance microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The design and analysis of micro- and nanoscale electromechanical systems, devices, and structures is not a simple task because electromagnetic, mechanical, thermodynamic, vibroacoustic and other problems must be studied in the time domain solving partial differential equations. The structural complexity of micro- and nanoscale systems and devices has been increased drastically due to hardware and software advancements as well as stringent achievable performance requirements imposed. To study MEMS and NEMS, micro- and nanoscale devices and structures, ICs and antennas, one applies the electromagnetic field theory and mechanics. The problems of modeling, analysis, and control of MEMS are very important in many applications. A mathematical model is a mathematical description of MEMS which integrate motion microdevices, radiating energy microdevices, microscale driving/sensing circuitry, and controlling/signal processing ICs.
