ABSTRACT
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Microelectromechanical systems (MEMS) were born out of the integrated circuit
revolution of the 1960s, 1970s, and 1980s, and as such share much of the same
fabrication technology and materials. While many of these materials are space
qualified, and have been used in space electronics for decades, new issues must
be accounted for when using them in sensors and actuators. When choosing which
materials to use in a MEMS device, it is important to look at the device as a system
of materials. The fabrication processes used to make the device, as well as their
intended use will control the material selection. These selections will in turn affect
the final performance of the MEMS device.
