chapter  4
16 Pages

Impact of Space Environmental Factors on Microtechnologies

References............................................................................................................... 82

Microelectromechanical systems (MEMS) devices used in space missions are

exposed to many different types of environments. These environments include

manufacturing, assembly, and test and qualification at the part, board, and assembly

levels. Subsystem and system level environments include prelaunch, launch, and

mission. Each of these environments contributes unique stress factors. An overview

of these stress factors is given along with a discussion of the environments.