Antistatic Technology | 15 | Scientific Wet Process Technology for Inn

ABSTRACT

I. Mechanism of Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294

A. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294

B. Main Mechanisms of Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294

1. Contact-Frictional Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294

2. Peeling Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296

3. Combined Electriﬁcation of Friction and Peeling . . . . . . . . . . . . . . . . . . . 296

4. Streaming Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296

5. Induction Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296

6. Spray Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 297

C. Spray Electriﬁcation and Countermeasures . . . . . . . . . . . . . . . . . . . . . . . . . . . . 297

1. One of the Generation Processes of Spray Electriﬁcation

is Development Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 297

2. Adverse Effect of Electrostatic on the Device . . . . . . . . . . . . . . . . . . . . . . 298

a. Adverse Effect of Electrostatic Charge Quantity . . . . . . . . . . . . . . . 299

b. Adverse Effect of Electrostatic Impressed Time . . . . . . . . . . . . . . . 301

3. Evaluation of Spray Electriﬁcation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 301

4. Electrostatic Countermeasure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303

a. Neutralizing Spray Electriﬁcation: Neutralization using

Ionizer and Soft X-Rays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 304

b. Neutralizing Spray Electriﬁcation: Voltage Control of Pipe . . . . . . 304

5. Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 307

References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 307

II. Surface Electrostatic Charge Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . 307

A. Signiﬁcance of Static Electricity Control in ULSI Manufacturing Process . . . 307

B. Principle of Electrostatic Charge Measurement . . . . . . . . . . . . . . . . . . . . . . . . 308

C. Electrostatic Charge Measurement and its Applications . . . . . . . . . . . . . . . . . 308

1. Measurement of Electrostatic Charge on PFA

Surface (Insulator Surface) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 308

2. Measurement of Electrostatic Charge on Parallel-Plate

Capacitor (Conductor Surface) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 309

3. Measurement of Dielectric Relaxation of Polymer Materials . . . . . . . . . . 310

4. Evaluation of Destaticization Capability of IPA . . . . . . . . . . . . . . . . . . . . 311

a. Measurement of Destaticization Capability of IPA Vapor . . . . . . . . 311

b. Destaticization Capability of Liquid-Phase IPA . . . . . . . . . . . . . . . . 311

c. Voltage of Charged-Up Object and IPA Destaticization

Capability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 312

d. Destaticization Capability of IPA Aqueous Solution . . . . . . . . . . . . 312

e. Destaticization Mechanism of IPA Vapor Dry Process . . . . . . . . . . 313

D. Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 314

References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 314

The electrostatic issue, classic yet new, has become obvious along with the progress in more

integrated designing of semiconductor device in a large area from large scale integration (LSI)

designing and manufacturing to application, and is now taken measure of. The electrostatic issue

is considered to be such a signiﬁcant issue that books on it are still being published.