ABSTRACT

How high a performance can be achieved in silicon-based bipolar transistors? An answer to such a

question surely considers many assumptions. New discoveries continue to affect the critical aspects of

device operation such as charge storage, carrier transport, and parasitics. Other discoveries affect the

processing of the device, leading to even better ways to make the device structurally ideal. One example

of a historic discontinuity in device fabrication and operation is the development of production-ready

SiGe epitaxy. Before the advent of SiGe epitaxy, predictions toward device limits would likely have made

certain assumptions regarding emitter charge storage or minority carrier diffusion and this would clearly

be off the mark due to the significant advancement in SiGe band engineering. More recently, the

incorporation of carbon has provided a boost, strongly affecting the diffusion of dopants and thus

providing a greater control over the device structure. Similar innovations are expected to continue to

provide a boost to the device operation, and so continually change the assumptions that may go into

predicting limits of device operation.