ABSTRACT
Microphotonic technology has been greatly advanced by recent developments in miniature optoelectronic systems. These devices couple photonics with electronics and micromachined structures that operate on the micron level. They are called optical MEMS, or MOEMS. These structures merge the functions of sensing and actuation with computation and communication to locally control physical parameters at the micron scale. MOEMS is a portfolio of techniques and processes that are used to design and create miniature systems. The integration of MOEMS with guided-wave optics can have a significant impact in improving the performance and reducing the size of photonic systems.
