ABSTRACT
Common conventional varactors at lower frequencies are reverse biased semiconductor abrupt p+-n junction diodes made from GaAs or silicon [2]. The hyperabrupt p+-n junction varactor diode has a nonuniform n-doping profile and is often used for voltage tuning. The n-doping concentration is very high close to the junction and the doping profile is tailored to improve elastance ratio and sensitivity. Such doping profiles can be achieved with epitaxial growth or by ion implantation. However, metal-semiconductor junction diodes (Schottky diodes) are superior at high frequencies since the carrier transport only rely on electrons (unipolar device). The effective mass is lower and the mobility is higher for electrons compared to holes. Furthermore, the metal-semiconductor junction can be made very precisely even at a submicron level. A reverse biased Schottky diode exhibits a nonlinear capacitance with a very low leakage current. High frequency diodes are made from GaAs since the electron mobility is much higher than for silicon.
