ABSTRACT
In this chapter we describe the technology currently used in x-ray metrology (XRM) tools. Since this changes rapidly, it is given in outline only, simply in order to give some familiarity with the tool systems used in practice. We emphasize the fundamental issues of metrology in x-ray tools. As has been seen (and is discussed further in Chapter 15), the interferometric methods of XRM are traceable with suitable care. They depend upon knowledge of the wavelength and angle metrology, and we shall point out how these are determined. The implications on repeatability, reproducibility, and accuracy or trueness are discussed in Chapter 15.
