ABSTRACT
Owing to the very small lattice constants of inorganic crystals (fractions of nanometers for our compound semiconductors), their crystalline lattice properties cannot be analyzed with optical microscopy, but illumination with much shorter wavelength is required. Therefore, an important tool to characterize compound semiconductors and respective epitaxial structures is high- resolution x-ray diffraction sometimes abbreviated as HRXRD, with which very important information can be obtained like
lattice constants,
chemical composition of ternaries, etc.,
strain,
quality, dislocation density, etc., and
superlattice period,
