ABSTRACT
It is possible to control the surface properties with HCl concentration and etching time, for example. Moreover, the substrates displayed also anticorrosion and anti-icing properties. In order to obtain micro- and nanostructured superhydrophobic properties with very low adhesion and also superoleophobic properties, these etched substrates can be modified to induce nanoroughness on the "building block" microstructures. In order to enhance the superhydrophobic properties, silicon nanowires were formed on micropattern substrates. The sputter deposition is a physical vapor deposition process allowing the ejection of a material (target) onto a substrate. Radio frequency (RF) magnetron sputtering is a method used in the literature to fabricated superhydrophobic nanostructures metals and metal oxides. The structure formation can be controlled with different parameters such as the gas flow, the flow rate and the temperature. For example, aluminum, copper, silver, gold, zinc, and cadmium nanocrystals with superhydrophobic properties were reported with this technique.
