ABSTRACT
In the formula (1), ΔL = 2[z-h(x, y)]; x, y refers to the two-dimensional coordinate values on the
1 INTRODUCTION
At present, the research on the three dimensional micro contour measurement of the optical noncontact surface is carried out in the University and Research Institute. Firstly, the research works have not formed the scale, secondly they are all laboratory products or the principle prototypes. The measurement range is small, and the measurement speed is slow (Groot & Lega 2002, Thian & Wong 2006). In recent years, the measurement of surface 3D micro contour in the optical non-contact field has been greatly developed in foreign countries, not only in the commercialization of measurement and control instrument, but also in the measurement range, measurement accuracy, measurement speed and practicality (Huang & Cheng 2012).
