ABSTRACT
This chapter shows that for quickly measuring surface cleanliness, it is most convenient to use an instrument based on a tribometric method that involves measuring the coefficient of sliding friction. The key methods for quickly measuring the cleanliness of substrate surfaces are frustrated multiple internal reflection spectroscopy, the method of measuring the Volta potential, the tribometric method, and the wettability method. The method involves vibrating a point probe with set amplitude above the test surface and determining the change in the probe's capacitance in response to contamination of the substrate surface. Assessing cleaning efficiency with tribometric methods requires knowing the extent of the effect that the indenter has on the properties of the test surface. The chapter discusses how the parameters and operating regimes of the tribometer used in the method of tribometric interaction between various substrates can be optimized for quickly measuring surface cleanliness.
