ABSTRACT
This chapter offers insight into the physical basis of technology computer-aided design (TCAD) to allow users to leverage these tools effectively. The author provides a detailed survey of the challenging issues for TCAD, with an emphasis on the fundamentals of the models themselves. Some of the other reported 3D device CAD tools include HFIELDS 3D, DESSIS, and FLOODS from the University of Florida. DESSIS is the basis of the commercial Sentaurus Device (SDevice) simulator from Synopsys. Currently, the main sources of commercial TCAD tools are Silvaco and Synopsys. Synopsys TCAD tools include Taurus-Process/Taurus-Device TSUPREM4/MEDICI for 2D TCAD and SProcess/SDevice for both 2D and 3D TCAD. Silvaco TCAD tools include ATHENA for 2D process simulation, ATLAS for 2D device simulation, and VictoryProcess/VictoryDevice for 3D simulation. A fabrication simulator ATHENA can be used to “build” a device by simulating the device’s fabrication or a CAD tool like DEVEDIT can be used to define the structure.
