ABSTRACT
This chapter describes the pollution prevention options available to the electronics industry, specically the microelectronics industry. The microelectronics industry manufactures high-quality electronic components (e.g., computer microchips). Fabrication steps required to produce microchips consume signicant resources, use hazardous chemicals, and generate a substantial amount of waste solvents and wastes containing heavy metals. Semiconductor production requires an ultraclean process. Consequently, signicant treatment is required for material reuse within semiconductor manufacturing processes. There may be opportunities for water recovery and reuse outside of the manufacturing process, as well as within support services such as cooling water makeup, scrubber water makeup, and so forth.
