From Conventional Polysilicon Siemens Process to Low-Energy Fluidized Bed Processes Using Silane

The challenge to inexpensively purify silicon presents two significantly different routes. The common beginning is the carbothermic reduction of high-quality quartz to produce metallurgical-grade silicon (see Figure 5.1) [1]. The process is energy intensive (14-16 kWh/kg) [2] and the material obtained is typically about 98%–99.5%

5.4.3 Non-Rod Reactor Development ........................................................ 219 5.4.4 Fluidized Bed Development .............................................................220