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Getter And Getter-Ion Vacuum Pumps

DOI link for Getter And Getter-Ion Vacuum Pumps

Getter And Getter-Ion Vacuum Pumps book

Getter And Getter-Ion Vacuum Pumps

DOI link for Getter And Getter-Ion Vacuum Pumps

Getter And Getter-Ion Vacuum Pumps book

ByGeorgii L. Saksaganskii
Edition 1st Edition
First Published 1994
eBook Published 18 June 2019
Pub. location London
Imprint Routledge
DOI https://doi.org/10.4324/9781315541495
Pages 368 pages
eBook ISBN 9781315541495
SubjectsPhysical Sciences
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Saksaganskii, G. L., Shelnitz, P. (1994). Getter And Getter-Ion Vacuum Pumps. London: Routledge, https://doi.org/10.4324/9781315541495

This unique monograph discusses all aspects of the design and operation of electrophysical ultrahigh-vacuum pumps (EUVP). The adsorption-diffusion model of interaction of gas molecules with metal getters is presented, together with getter films sorption characteristics. A mathematical model of molecular transfer in electrophysical pumps and the principles and criteria of their energy and structural-geometrical optimization are proposed; and the physical processes in the pumps are analyzed during the pumping out of both active and inert gases. Also presented are the generic and specific pump parameters and the methods of calculating their main characteristics.

Of special interest are discussions of the design, structure, and operational featuress of evaporation getter and ion-getter pumps with thermal deposition of getter films; EUVP with plasma evaporation; sputter-ion pumps with and without built-in evaporators; pumping out methods based on nonevaporable getters; and impantation, membrane and catalytic pumps. This book will appeal to experts and students in experimental physics, electronics, fusion accelerator techniques and electrophysical and vacuum apparatus design.

TABLE OF CONTENTS

chapter Chapter 1|29 pages

Basic Characteristics of Electrophysical Pumps

WithGeorgii Leonidovich Saksaganskii

chapter Chapter 2|51 pages

Principles of the Planning and Optimization of the Geometric Structure of Electrophysical Pumps

WithGeorgii Leonidovich Saksaganskii

chapter Chapter 3

Evaporative Getter and Getter-Ion Pumps with Thermal Deposition of Getter Films

WithGeorgii Leonidovich Saksaganskii

chapter Chapter 4|49 pages

Electrophysical Pumps with Plasma Sources of Getter Films

WithGeorgii Leonidovich Saksaganskii

chapter Chapter 5|28 pages

Sputter-Ion Pumps: Physical Processes

WithGeorgii Leonidovich Saksaganskii

chapter Chapter 6|49 pages

Sputter-Ion and Combined Pumps: Calculation, Design, and Operation

WithGeorgii Leonidovich Saksaganskii

chapter Chapter 7|57 pages

Nonevaporable Getters and Pumping Devices Based on Them

WithGeorgii Leonidovich Saksaganskii

chapter Chapter 8|40 pages

Principles of the Creation of Nontraditional Electrophysical Pumps

WithGeorgii Leonidovich Saksaganskii
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