ABSTRACT
The early development of microsystem technologies, the meaning and technical characteristics of this area have various understandings for different people. The world’s main countries in the world have their own naming according to their own development histories of the field. It is called Micromachine in Japan since their development thought is from large machining to small machinery, and to micro machine [4]. It is named Microelectromechanical System (MEMS) during to its development based on microelectronic fabrication technology in North America [5]. And it is called Microsystem Technologies for it is considered as system in Europe. What the name is not unified shows that the development of this field is still at an early stage of development. Despite the different names, but the contents are in convergence. It the early stages, named Micromachine is proper slightly due to from large machining to small machinery, and to micro machine; With nearly twenty years of development in this field, especially the mainstream processing is based on the microelectronics technology the, Moreover, its products are from a single separation part to the small system, some even a system of micro electro mechanical system, called micro machinery is inarticulate. Obviously, MEMS is worthy of the name; With the further research in this field, its product even is a complex system. It also comprises a light, sound and
1 INTRODUCTION
Microsystem technology is an advanced interdisciplinary emerging, developed in recent twenty years [1]. It covers almost all fields of natural science and engineering technology, Including electronics, mechanical, materials, manufacturing, information and automatic control, physics, chemistry, biology and other disciplines, and associated with many sophisticated and intensive achievements of modern science and technology. It has extensive applications in information, communication, aviation, aerospace, automotive, medical, biological, environmental protection, industrial control and other areas [2,3]. Microsystem technologies will be one of the most influential hightech in twenty-first century, and a new growth point of high-tech industry. It is considered a new industrial revolution in twenty-first century. The research in this field is developing rapidly during to enormous human and material resources in the main countries of the world. Investment of this field also increases in China, and many famous domestic universities also set up this course.
