ABSTRACT
Radio frequency, microwave and millimeter wave circuits have been conceptualized using microelectromechanical systems (MEMS) as early as the 1990s. MEMS devices can be fabricated in large numbers on a single chip using conventional integrated circuit and semiconductor processing technologies. The microstrip transmission line also attracts attention in micromachining for high-performance passive circuits. Radio frequency MEMS metal-contact switches show a great promise in defense applications like wideband transceivers and phased array systems. MEMS technology offers much lower insertion loss, good matching, excellent phase accuracy, and high linearity over a larger bandwidth and lower power consumption compared to other solid-state technologies. Electronic beam steering is a primary issue in modern phased arrays systems and is extensively used in military and commercial applications such as wireless communications and radar systems. The chapter also presents an overview of the key concepts discussed in this book.
