ABSTRACT

Radio frequency microelectromechanical systems-based single-pole multithrow (SPMT) switches exhibit superior performance in terms of isolation, loss and linearity compared to solid-state switches. SPMT switches have shown a lot of potential in Radio frequency communication systems such as cell phones and tablets operating as per 3G/4G or even in 5G standard. A wide range of SPMT switches is discussed utilizing the coplanar waveguide transmission line where M varies from 2 to 14 throws. Different SPMT switching networks have been reported so far using solid-state technology like Si-on-insulator and Si-on-sapphire. These switches demonstrate excellent characteristics up to 2.7 gigahertz (GHz), but their performance degrades after 3 GHz in terms of insertion loss and isolation. The electromagnetic performance was initially observed on the single microelectromechanical systems switch used in the single-pole four-throw circuit. Calibration is done using the short-open-load-through method. The conditions are ON-wafer and using a probe station; room air; standard laboratory pressure, and temperature and humidity; nonpackaged.