ABSTRACT

Readers will find descriptions of nanoscale characterization tools in this chapter. As well, the basic theory of operation of scanning probes microscopes is included. The scanning tunneling microscope and the atomic force microscope are the two main scanning probe methods included in this chapter. In addition to the theory of operation, various operating modes and applications of atomic force microscopy are included in this chapter. There are two types of electron microscopes discussed in this chapter: the scanning electron microscope and the transmission electron microscope. A description of key components associated with the successful operation of each electron microscope is included. Three specific beam–specimen interactions, as well as the information gathered from these interactions is included herein.