chapter  12
Modeling and Control of a MEMS Micro X–Y Stage Media Platform
ByChunling Du, Chee Khiang Pang
Pages 21

In this chapter, a micro X–Y stage with 6 mm × 6 mm recording media platform actuated by capacitive comb drives is introduced, which was once fabricated in a so-called “nanodrive” probe-based storage system (PBSS) [1–4]. The developed prototype was fabricated by micromachining techniques with the integration of a 40 nm thick polymethyl methacrylate (PMMA) recording media. Using finite element analysis (FEA) on the developed platform, the first two dominant in-plane resonant modes of the micro X–Y stage at 440 Hz are captured. A displacement range of up to 20 μm can be achieved at an input driving voltage of 55 V. A capacitive self-sensing actuation (CSSA) circuit and robust decoupling control scheme are also designed for the micro X–Y stage to have improved control performances. As an alternative futuristic data storage platform, the PBSS is successfully demonstrated in the “Millipede” project [1].