chapter  2
18 Pages

High-Precision Positioning Control of Dual-Stage Actuation Systems

ByChunling Du, Chee Khiang Pang

As stated in Chapter 1, the dual-stage actuation system is employed as an effective way to increase the overall control system bandwidth and achieve required disturbance rejections, so that high positioning accuracy can be accomplished. These are the objectives to be kept in mind when the controller design is being carried out. Examples of existing work are [1] on fundamental control design with concentration on pushing bandwidth [2], on phase-stabilized control to deal with narrow-band vibrations [3], on optimal control with the disturbance models, and [4] on a nonlinear method to improve system stability with the presence of secondary actuator’s saturation.