ABSTRACT
Monte Carlo (MC) simulations of electron trajectories for multi-layered sample geometries are used for studying the depth and lateral SEM resolution under various experimental conditions. The resulting three-dimensional beam energy dissipation data is used to evaluate depth and radial beam exposure information, which provides an insight into depth and lateral resolution of electron beam techniques. The application of such simulations to compound materials and the various methods used for calculating average parameter values are discussed. Different average value calculation methods can result in significantly different electron doses, the choice of which can not be made a priori without comparison with experimental data.
