ABSTRACT
This chapter describes the method of energy loss spectroscopic profiling (ELSP) in a transmission electron microscope, with emphasis on the implementation for a post-columnar energy filter and the optimisation of both energy and spatial resolution. In a transmission electron microscope with an imaging energy filter and a two dimensional detector such as a charge-coupled device camera the electron energy loss spectrum can be recorded as a function of a real space coordinate perpendicular to the direction of dispersion. Drawbacks are the need for precise specimen orientation with respect to the energy-dispersive direction of the filter, a limited real-space sampling in the case of standard near axis spectrometer operation and problems with achromaticity as well as non-isochromaticity. If a thin film structure or an individual interface is to be analysed using ELSP, then the specimen must be aligned so that the interface is oriented parallel to the energy-dispersive direction of the filter.
