ABSTRACT
High-resolution transmission electron microscopy (HRTEM) and energy-filtered TEM have been carried out on an AIN/GaN superlattice. From a quantitative analysis of lattice fringes profiles, we deduced the thickness and the chemical composition of the layers. Experimental and simulated HRTEM images were analysed using both a projection and the geometrical phase method. Conventional and HRTEM studies were performed on a JEOL 4000EX electron microscope. GaN/(Al,Ga) heterostructures have potential application in the range of ultraviolet em1sswn and detection. However, few studies have been reported on the GaN/AIN heterostructure. The simulation of the HRTEM images was carried out with the EMS software using the multislice method. Quantitative analysis HRTEM images were obtained and first goal was to determine the experimental parameters for which these HRTEM images were taken.
