ABSTRACT
Solar cells using amorphous hydrogenated silicon (a-Si:H) formed by the plasma-deposition process have received much attention. This chapter discusses the fabrication methods, devices, characteristics, and potential applications of a-Si:H solar cells using plasma deposition. Electric power is generated by utilizing the photovoltaic effect which occurs when incident light strikes certain semiconductors. The general features of a-Si:H solar cells and their manufacturing process are very attractive compared to those of conventional single crystal solar cells. Nevertheless, their conversion efficiency was initially extremely low, at 2.4%. The emphasis in research was originally placed on improving the conversion efficiency, and this still remains the emphasis today. The chapter describes some developments in fabrication, device structure, and characteristics of these solar cells that have contributed greatly to improving conversion efficiency. New devices which take advantage of the natural features of the plasma-deposition method and a-Si:H films continue to appear.
