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Chapter

ZnO:Al by facing target planar magnetron sputtering

Chapter

ZnO:Al by facing target planar magnetron sputtering

DOI link for ZnO:Al by facing target planar magnetron sputtering

ZnO:Al by facing target planar magnetron sputtering

Edited ByA Glocker David

BookHandbook of Thin Film Process Technology

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Edition 1st Edition

First Published 1998

Imprint CRC Press

eBook ISBN 9781351072793

ABSTRACT

Contributed by Kikuo Tominaga, Kazutaka Murayama and Ichiro Mori

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