ABSTRACT

The diffraction patterns due to light scattering from precipitates in annealed Si crystals were observed at a defocus position on light scattering tomography (LST) apparatus. They were clearly different from one pattern to the other ones while every image at a focus position is a small point. The diffraction patterns obtained at a position deviated by 30 μ m from the focus position were transformed into an image by Fourier analysis as Fresnel diffraction using a tentative phase data. The process is similar to the process of an X-ray structure analysis. A good similarity between the images observed here and images transmission electron microscopy(TEM) is obtained.