ABSTRACT
This chapter reviews the application of small-angle X-ray scattering for the measurement ofperiodic nanostructures. X-ray measurements have the potential to monitor the fabrication of three-dimensional nanostructures with critical dimensions under 10 nm. The focus is on the application of transmission scattering measurements that have been shown to be capable of evaluating the detailed structure of complex line gratings by rotating the sample and taking measurements at a range of sample angles. The application of this technique to a variety of different samples is reviewed. The advances necessary for transitioning this measurement from a synchrotronbased technique to an in-line process metrology are discussed.
