ABSTRACT

Double-patterning requirements have the greatest impact on the routing step. Because the routing stage now handles more than just the normal routing Design-Rule Check (DRC), Double-Patterning (DPT) violations also should be fixed during routing. The two key points of critical issues affecting DPT violations are:

1. The DPT spacing rule: it is the minimum spacing requirement applied on uncoloured design or same coloured neighbour metal, including side-to-side, tip-to-tip, tip-to-side and cornerto-corner. Figure 2 shows the DPT spacing rule (Finders et al. 2008).