ABSTRACT
POU devices are designed for treating emissions from the outlet of the semiconductor processes, so as to remove the contaminants of interest before they enter the centralized exhaust system. POU devices have been installed to increase production uptime, to protect fab assets, and for personnel health and safety reasons; in a few cases POU devices can be installed for environmental reasons. Some of the POU devices are interlocked with the process equipment (i.e., when the POU device fails, the process equipment is shut down). A delayed shutdown can be set up to allow the wafer run to finish, as long as it is safe.
