ABSTRACT
This chapter presents a discussion on diamond film growth techniques, integrated circuit-compatible polycrystalline diamond (poly-C) processing, electroluminescence in diamond and field emission electroluminescence in poly-C. The structural reliability and lifetime of Micro Electro Mechanical Systems are critical for their use in opto-electronic devices/systems, biomedical instruments, automobiles, aircraft and satellites. The light emission properties are due to defects in diamond which in pure form does not emit light because it is an indirect-type semiconductor. Cathodoluminescence (CL), produced by an electron beam incident on the diamond surface, has been used to study defects near the diamond surface. The sharp peaks were often associated with impurity atoms or aggregates. Nitrogen-containing defects generated numerous CL peaks.
