ABSTRACT
Microactuators are one of the most important components in microelectromechanical systems (MEMS). Th e simplest and earliest actuating elements are microcantilevers. In the late 1980s, microactuators received increasing attention when electrostatically driven micromotors started to appear [1,2]. In the last 15 years, many types of microactuators utilizing various driving forces (e.g., electrostatic, electromagnetic, piezoelectric, shape memory alloy (SMA) etc.) have been developed. Piezoelectric actuation is one of the most popular actuation principles used for microactuators.
