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MEMS and NEMS: Nanoscale Sensors and Actuators
DOI link for MEMS and NEMS: Nanoscale Sensors and Actuators
MEMS and NEMS: Nanoscale Sensors and Actuators
BookDekker Encyclopedia of Nanoscience and Nanotechnology, Seven Volume Set
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Edition 3rd Edition
First Published 2011
Imprint CRC Press
Pages 18
eBook ISBN 9781351238175