ABSTRACT

Gordon Moore made a revolutionary prediction in 1965 that integrated circuit complexity would double every 24 months with respect to the minimum component cost. This prediction, later known as Moore’s law, has driven an exponential reduction of transistor feature size and resulted in the portable, yet computationally powerful, electronic tools that we enjoy today. These incredible feats of miniaturization are in large part due to advances in the microfabrication technology used to construct individual transistors starting from a plain silicon (Si) wafer.