ABSTRACT
In conventional motion stage designs, multiple motors and coupling mechanisms (like gears and link mechanisms) are used to implement multi-DOF (degrees of freedom) movements. However, such kinds of designs will incur friction, which degrades the control precision. Motivated by this phenomenon, air bearing stages have been suggested to overcome friction. An air bearing system is based on a pressurized thin film of air to support an applied normal load [1]. For over 30 years, the industry has found it can move heavy, cumbersome loads and equipment easier and faster by using frictionless air. Moving heavy loads on air is a clean, quiet, and safe method that will not damage floors. Comparing the air bearings with other types of bearings (including rolling bearings and fluid bearings), air bearing has low viscosity and offers lower friction and smaller sensitivity to temperature variation [2].
