ABSTRACT
Recently, the need for semiconductor devices, extremely compact electrical circuits, and integrated circuit packages that contain devices having micro dimensions has led to the introduction of micromachining. The circuit board must have microholes if relays and switches are required to be assemblies of microsized parts. Fuel injection nozzles for automobile have become smaller in size and more accurate to solve many environmental problems. In the area of biotechnology that includes biological cells and genes, the tools required to handle them must have microeffectors. Miniaturization of medical tools for inspection and surgery is another candidate for micromachining processes (Masuzawa, 2000).
