ABSTRACT
The Boltzmann equation is the basis for the kinetics of charged particles and neutral molecules in nonequilibrium and low-temperature plasmas that are maintained and controlled under a short-range two-body collision with feed gas molecules [1]. Of course, gas molecules have their own quantum states through their electronic configuration in a low-temperature plasma. Each of the atoms and molecules with a different quantum state exhibits unique characteristics in collision with an electron or ion. This provides a very interesting world of low-temperature plasmas with different functions reflected by the quantum structure even in a fixed external plasma condition. Therefore, it is essential to understand the terms of the collisions-including various kinds of two-body collisions-between electron and neutral molecules in the Boltzmann equation.
