ABSTRACT
Technological development of silicon CMOS device fabrication technology has much affected the development of micro-electro-mechanical systems (MEMS) technology. Recent advancement of nanoscale silicon device technology has also been bringing the MEMS technology into nanoscale: nano-electro-mechanical systems (NEMS). The scaling trend of the characteristic length of the electromechanical resonators is plotted in Figure 6.1 together with that of the CMOS physical gate length [1]. The characteristic length of the NEMS will merge with that of the silicon CMOS in the next decade, indicating hybrid NEMS-CMOS devices will be more realistic and
6.1 Introduction .................................................................................................. 123 6.2NEM Switches ..............................................................................................124
