ABSTRACT
There is an undeniable drive toward understanding materials and systems at nanometer length scales. Electronic devices, of course, are continually pushed toward smaller and smaller dimensions; bulk material properties are largely determined
5.1 Overview .........................................................................................................69 5.2 Atomic Force Microscopy .............................................................................. 70
5.2.1 Introduction and Components ............................................................ 70 5.2.2 Mechanisms of Operation ................................................................... 71 5.2.3 High-Speed AFM ............................................................................... 74 5.2.4 Scanning Conductance Microscopy ................................................... 74 5.2.5 Scanning Microwave Microscopy ...................................................... 75
5.3 Transmission Electron Microscopy ................................................................ 76 5.3.1 Introduction and Components ............................................................ 76 5.3.2 Electron Energy Loss Spectroscopy ................................................... 79 5.3.3 Contrast Tuning .................................................................................. 79 5.3.4 TEM Tomography ............................................................................... 81
5.4 Scanning Electron Microscopy ...................................................................... 82 5.4.1 Introduction and Components ............................................................ 82 5.4.2 Energy-Dispersive X-Ray Imaging .....................................................85 5.4.3 Cathodoluminescence .........................................................................85
